Dielectric materials are of critical importance in the function of microelectronic devices. This article outlines why and the mechanical characterization of Ultra Low-k Dielectric Films.
Low-k dielectric for future chips expands in place to fill gaps
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Schematic diagrams of porous low- k dielectric materials showing ͑ a ͒
Bruker : Quotes, Address, Contact
PDF) Effect of low-frequency radio frequency on plasma-enhanced chemical vapor deposited ultra low-dielectric films for very large-scale integrated interconnects
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Bruker Nano Surfaces and Metrology : Quotes, Address, Contact
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Understanding Ultra Low-k Dielectric Films
Part 1 - Introduction of low k dielectric material